多波長角度可變橢偏儀 / 鼎昕科技(股)公司

Fast spectroscopic measurement
5 sec for full spectra of {Δ,Ψ} over 350 ~ 840 nm (or 1.5~3.5 eV)

UV option
250 ~ 840 nm (or 1.5 ~ 5.0 eV) requires external lamp power supply

Manually variable angle of incidence
45˚~ 90˚with 5˚step

Single body system
40cm (W) x 30cm (D) x 30cm(H),15Kg (typical)n

Easy operation
No set-up, No keys to control, Maintenance-free (except lamp) User-friendly operation and analysis software provided

Sample size
(5mm x 5mm) ~ (200mm x 200mm)

Option
Mapping stage (manual or automatic)

Spectroscopic Ellipsometer

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